Understanding Hyperlith Tutorial 8 Barc Optimization With Standing Wave Metric

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Key Takeaways about Hyperlith Tutorial 8 Barc Optimization With Standing Wave Metric

  • Not all
  • This is a demonstration of
  • A 32nm line is simulated at five different pitches. At each pitch a bias is sought to cause the line to print at 32nm.
  • Standing wave
  • What is a

Detailed Analysis of Hyperlith Tutorial 8 Barc Optimization With Standing Wave Metric

The Interference between two OPC and source

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